I had the same problem with my 93' (2005 engine), I decided to crack open the case and inspect the balancer system. My bike developed this slight ticking, lost power, erratic idling and very viby. I found the stock doohickey was in tact but the spring had lost tension causing slack in balancer system. I ordered a Eagle Mike Doohickey with torsion spring and installed it last night.
Problem solved, bike feels brand new and is very buttery smooth.
have you inspected/adjusted your doohickey lately?